Planar Semiconductor AG
“Damage-free critical cleaning
and resist/strip solutions.”


Planar’s product mission is to provide innovative single wafer wet cleaning and surface preparation systems which perform so well that they actually improve our customers’ advanced manufacturing productivity and yields.

To accomplish this mission, Planar has developed the Pulsar™ architecture of vertically-oriented systems (of which the 300mm version has now been released), which are unique in their ability to simultaneously clean the front, back and bevel areas of a silicon wafer. These Pulsar™ systems have been designed to provide industry-leading throughput, ease of both installation and maintenance service, and high reliability.