Planar Semiconductor AG
“Damage-free critical cleaning
and resist/strip solutions.”


Planar’s product mission is to provide innovative single wafer wet cleaning and surface preparation systems which perform so well that they actually improve our customers’ advanced manufacturing productivity and yields.

To accomplish this mission, Planar has developed the Generation II Pulsar™ family of vertically-oriented 200mm, 300mm and – soon to be released – 450 mm systems, which are unique in their ability to simultaneously clean the front, back and bevel areas of a silicon wafer. These Pulsar™ systems have industry-leading throughput and have been designed for ease of both installation and maintenance service, as well as for high reliability. Previously, Planar had offered its Generation I family of 100 mm and 200mm RPC systems, which proved – in high volume wafer fabrication applications – the superior efficacy of simultaneous multi-surface cleaning a vertically-positioned wafer.